X射线光电子能谱课件(英文版).pdf
《X射线光电子能谱课件(英文版).pdf》由会员分享,可在线阅读,更多相关《X射线光电子能谱课件(英文版).pdf(103页珍藏版)》请在咨信网上搜索。
1、X-Ray Photoelectron Spectroscopy(XPS)/Electron Spectroscopy for Chemical Analysis(ESCA)香港城市大擘City UniversityOf Hong KongX-ray Photoelectron SpectroscopyIn t roduc t ionIn st rumen t a t ionQua lit a t ive a n a lysisQua n t it a t ive a n a lysisDept h prof ilin gSma ll a rea a n a lysis a n d XPS i
2、ma gin gApplic a t ion exa mplesCha rgin g c ompen sa t ionPhotoelectric EffectEin st ein,Nobel Prize 1921Phot oemission a s a n a n a lyt ic a l t oolKa i Siegba hn,Nobel Prize 1981香港城市大擘City UniversityOf Hong KongXPS,a lso k n own a s ESCA,is a widely used surf a c e a n a lysis t ec hn ique bec a
3、 use of it s rela t ive simplic it y in use a n d da t a in t erpret a t ion.XPS X-ra y Phot oelec t ron Spec t rosc opyESCA Elec t ron Spec t rosc opy f br Chemic a l An a lysisUPS Ult ra violet Phot oelec t ron Spec t rosc opy PES Phot oemission Spec t rosc opyElec t ron en ergy a n a lyser香港城市大擘C
4、ity UniversityOf Hong KongICEj=hv BE spect BE=hv KE spectVacuum levelXPS spectrum of a UHV cleaved InP(110)surfece.Work f unction(|)3d_ c 3p 3sCon duc t ionVa len c eEf 3/2/1 L 11/24(3 3 S/S J U=O D)a w s u b u ihv:Al Ka(1486.6eV)2s41s4-t00 o008o 20 004 o60oBinding Energy(eV)P2sP 2P123/2Kin et ic En
5、 ergyPeak NotationsL-S Couplin g(-I s)For p9 d a n d f pea k s,t wo pea k s a re observed.U 4d5/2The sepa ra t ion bet ween t he t wo pea k s a re n a medspin orbital splitting.The va lues of spin orbit a l split t in g of a c ore level of a n elemen t in dif f eren t 4d3/2 1c ompoun ds a re n ea rl
6、y t he sa me.IThe peak area ratios of a c ore level of a n Ielemen t in dif f eren t c ompoun ds a re a lso n ea rly 11t he sa me.J ISpin orbit a l split t in g a n d pea k a rea ra t ios a ssist in elemen t a l iden t if ic a t ionXPS spectrum of a UHV cleaved InP(Utt)sor&ca(3as/SJU=0u)叁 SU5UI1000
7、800 600 400 200Binding Energy7(eV)0)Ap u 山 6pug0,-FERMI LEVEL-5d200 一-5P3/2 5P1/2 5s400 4f 5/2600 4d5/2800 5d 3/21000 4P3/21200 1400-4p1/2Rela t ive bin din g en ergies a n d ion iza t ion c rosssec t ion f or UIonization Cross-Section香港城市大擘City UniversityOf Hong KongAnalysis DepthIn ela st ic mea n
8、 f ree pa t h(X)is t he mea n dist a n c e t ha t a n elec t ron t ra vels wit hout en ergy lossdIs=Ioe-d/x32e 0oo2eX 1dxX工dx10For XPS,X in t he ra n ge of 5-35Aol-e-3二-=0.951Only the photoelectrons in the near surface region can escape the sample surface with identifiable energyMeasures top 3九 or 5
9、0-100AX-ray Induced Auger Electrons香港城市大擘City UniversityOf Hong KongVG ESCALAB 220i-XLKratos XPS systemTop ViewIn side:Hea t in g st a ge(ma x.1200 C)a n d f ila men t f br ra dic a l gen era t ionWien Filt erTa rget c ha mberGa t e va lveIon bea m sourc eUHV STM5 k eV a rgon ion gunMg x-ra y gunDos
10、in g un itUHV e-bea m eva pora t orQMS f br TDSMa gn etJCMA-QMSLow en ergy ion bea m syst emHea t in g/c oolin g st a ge f or TDS 八Det a c ha ble n it rogen glove boxUV sourc e f br UPSSa mple st a ge wit h hea t in g/c oolin gX-ra y mon oc hroma t orXPS唱詈 LWobblest ic kLEEDEn t ry loa dloc kXPS sys
11、tem suitable for industrial samplesVacuum Chamber Control ElectronicsIon pumpTurbopumpSample Introduction ChamberVacuum System5.8E-09 Torr香港城市大擘City UniversityOf Hong KongUHV ChamberSample Introduction SystemMax.Sample Height:28mmSample Transport SystemOptics Mounting BlockBParking StationlFiveAAis
12、StageParking StationyC Introduction Chamber.。J Platen Transfer ArmPrep Chamber Mount香港城市大擘 City UniversityOf Hong KongSample Positioning Station(SPS)MicroscopeSamplePlatenBase withPositionEncodersCameraA high ma gn if ic a t ion video ima gin g syst em c a pt ures opt ic a l ima ges wit h t he posit
13、 ion in f orma t ion a t t a c hed t o t he f ileThe posit ion in f orma t ion drives sa mple st a ge t o t he a n a lysis a rea when t he SPS ima ge f ile is rea d by t he Qua n t um 2000 syst emc omput er香港城市大擘City UniversityOf Hong KongX-ray induced secondary electron imaging for precise location
14、 of the analysis areasec on da ry elec t ron sSPS ima ge of a mic roc irc uit t ra n sf erred t o t he Qua n t um 2000 where t he a n a lysis poin t s c a n be def in ed.Observe t he det a ils t ha t is presen t f rom buried la yers,in a n opt ic a l ima ge500 x 500pmSXI ima ge f rom a selec t ed a
15、rea of t he SPS phot o.Observe t he SPS ima ge regist ra t ion a c c ura c y香港城市大擘 City UniversityOf Hong KongX-ray Source in Quantum 2000Scanning FocusedElectron BeamAluminum AnodeScanning Focused X-ray BeamEllipsoidalMonochromatorAnalyzer Input LensSamplePHI Quantum 2000香港城市大擘City UniversityOf Hon
16、g KongInstrumentation Elec t ron en ergy a n a lyzer X-ra y sourc e Ar ion gun Neut ra lizer Va c uum syst em Elec t ron ic c on t rols Comput er syst emUlt ra high va c uum IO-9 Torr(6U-P20JI862oq6_uA3PJOO0JHEMISPHERICAL SECTOR ANALYSERamplifierratemeterchannel i1 electron-1multiplier!X-Y recordere
17、lectron energy _*06EO al alwds-EW+Cylin dric a l Mirror An a lyzerCM A:Rela t ively high sign a l a n d good resolut ion 1 eV香港城市大擘City UniversityOf Hong KongConcentric Hemispherical Analyzer(CHA)S slit plate width.1F slit plate width,w2FactorsPa ss en ergyAn a lyzer ra diusSlit widt hElemen t s in
18、t he t ra n sf er len sEn ergy of t he phot oelec t ron s香港城市大擘City UniversityOf Hong KongDual Anode X-ray SourceAn ode f a c e ICooling water shields4 Fila men t 2日cd上Anode face 2香港城市大擘City UniversityOf Hong KongCommon ly usedX-ray linesLineEnergy,eVWidth,eV13230.47ZrM;15140.77NbM17L41.21MoM?19231.
19、53TiLa395.33.0Cr La572.83.0NiLa851.52.5CuLa929.73.8Mg Ka1253.60.7Al Ka1486.60.85Si Kt1739.51.0YLa1922.61.5ZrLa2042.41.7T1K24510.02.0CrKa5417。2 ACuKa8048.02.6X-ra y sourc e:Mg KaSiO2 sample0 IsB l s u a u J600 400 2001000 8000Bin din g En ergy(eV)O KLL f or Mg Ka a t 743 eV O KLL f or Al Ka a t 976eV
20、香港城市大擘City UniversityOf Hong KongX-ray monochromatorX-Ray Source(anode)nX=2dsin0For Al Ka九二 8.3Ause(lOTO)pla n es of qua rt z c ryst a l d=4.25A 6=78.5Adva n t a ges of usin g x-ra y mon oc hroma t or Na rrow pea k widt h Reduc ed ba c k groun d No sa t ellit e&ghost pea k s香港城市大擘City UniversityOf H
21、ong KongGeneral methods in assisting peak identification(1)Chec k pea k posit ion s a n d rela t ive pea k in t en sit ies of 2 or more pea k s(phot oemission lin es a n d Auger lin es)of a n elemen t(1)Chec k spin orbit a l split t in g a n d a rea ra t ios f br p,d9 f pea k sThe f ollowin g elemen
22、 t s a re f oun d:O,C,Cl,Si,F,N,S,Al,Na,Fe?K,Cu,Mn,Ca,Cr?Ni,Sn,Zn,Ti,Pb,V香港城市大擘City UniversityOf Hong KongChemical ShiftB.E.=En ergy of Fin a l st a t e-En ergy of in it ia l st a t eFinal state(on e a ddit ion a l+ve c ha rge)Initial state+qRedist ribut ion of elec t ron den sit y BE provides infor
23、mation on chemical environment香港城市大擘City UniversityOf Hong KongExample of Chemical ShiftHICIHoo cF IC IFCARBON Is500o1190 1195Kin et ic en ergy(eV)_295 290 280Bin din g en ergy(eV)香港域市大擘City UniversityOf Hong KongExample of Chemical ShiftShif t(eV)Oxida t ion st a t e香港城市大擘City UniversityOf Hong Kon
24、gChemical Shifts4f7/2 Bin din g En ergy(eV)Compoun d Type 83AuAuSnAuSiuYbAu2ClAuPh3PClAu(Ph3P)2CbAuPh3P(Ph3P)AuNO3 ClAu(Ph3As)(AuSPEt 2s-)2(-AuCH2PEt2CH2-)284 85 86 87 88Chemical ShiftsCompoundTVPe 982p Binding Energy(eV)101 104SilicidesSiliconCarbidesNitridesSiliconesSilicatesSilica1 香港城市大擘City Uni
25、versityOf Hong KongUse of Different Photon Energy(a)Zr Loc(b)Mg Koc(c)Ti KocoxideSi2040 eV1253.6 eV4510 eV香港城市大擘City UniversityOf Hong KongX-ray Induced Auger PeaksAuger pea k s a re a lso sen sit ive t o c hemic a l en viron men tBinding Energy(eV)Cu Chemical State in Cu ClustersAuger Pa ra met er=
- 配套讲稿:
如PPT文件的首页显示word图标,表示该PPT已包含配套word讲稿。双击word图标可打开word文档。
- 特殊限制:
部分文档作品中含有的国旗、国徽等图片,仅作为作品整体效果示例展示,禁止商用。设计者仅对作品中独创性部分享有著作权。
- 关 键 词:
- 射线 光电子 课件 英文
1、咨信平台为文档C2C交易模式,即用户上传的文档直接被用户下载,收益归上传人(含作者)所有;本站仅是提供信息存储空间和展示预览,仅对用户上传内容的表现方式做保护处理,对上载内容不做任何修改或编辑。所展示的作品文档包括内容和图片全部来源于网络用户和作者上传投稿,我们不确定上传用户享有完全著作权,根据《信息网络传播权保护条例》,如果侵犯了您的版权、权益或隐私,请联系我们,核实后会尽快下架及时删除,并可随时和客服了解处理情况,尊重保护知识产权我们共同努力。
2、文档的总页数、文档格式和文档大小以系统显示为准(内容中显示的页数不一定正确),网站客服只以系统显示的页数、文件格式、文档大小作为仲裁依据,平台无法对文档的真实性、完整性、权威性、准确性、专业性及其观点立场做任何保证或承诺,下载前须认真查看,确认无误后再购买,务必慎重购买;若有违法违纪将进行移交司法处理,若涉侵权平台将进行基本处罚并下架。
3、本站所有内容均由用户上传,付费前请自行鉴别,如您付费,意味着您已接受本站规则且自行承担风险,本站不进行额外附加服务,虚拟产品一经售出概不退款(未进行购买下载可退充值款),文档一经付费(服务费)、不意味着购买了该文档的版权,仅供个人/单位学习、研究之用,不得用于商业用途,未经授权,严禁复制、发行、汇编、翻译或者网络传播等,侵权必究。
4、如你看到网页展示的文档有www.zixin.com.cn水印,是因预览和防盗链等技术需要对页面进行转换压缩成图而已,我们并不对上传的文档进行任何编辑或修改,文档下载后都不会有水印标识(原文档上传前个别存留的除外),下载后原文更清晰;试题试卷类文档,如果标题没有明确说明有答案则都视为没有答案,请知晓;PPT和DOC文档可被视为“模板”,允许上传人保留章节、目录结构的情况下删减部份的内容;PDF文档不管是原文档转换或图片扫描而得,本站不作要求视为允许,下载前自行私信或留言给上传者【曲****】。
5、本文档所展示的图片、画像、字体、音乐的版权可能需版权方额外授权,请谨慎使用;网站提供的党政主题相关内容(国旗、国徽、党徽--等)目的在于配合国家政策宣传,仅限个人学习分享使用,禁止用于任何广告和商用目的。
6、文档遇到问题,请及时私信或留言给本站上传会员【曲****】,需本站解决可联系【 微信客服】、【 QQ客服】,若有其他问题请点击或扫码反馈【 服务填表】;文档侵犯商业秘密、侵犯著作权、侵犯人身权等,请点击“【 版权申诉】”(推荐),意见反馈和侵权处理邮箱:1219186828@qq.com;也可以拔打客服电话:4008-655-100;投诉/维权电话:4009-655-100。